Park, Suk Hee Shin, Hyun-Jun Kim, Yong-Hwan Yang, Dong-Yol Lee, Jong-Chul Lee, Sangyoup 2024-01-20T14:02:56Z 2024-01-20T14:02:56Z 2021-09-05 2012-09 0960-1317 https://pubs.kist.re.kr/handle/201004/128911 Novel cost-effective methods for polymeric and metallic nanochannel fabrication have been demonstrated using an electrospun nanofiber array. Like other electrospun nanofiber-based nanofabrication methods, our system also showed high throughput as well as cost-effective performances. Unlike other systems, however, our fabrication scheme provides a pseudo-parallel nanofiber array a few centimeters long at a speed of several tens of fibers per second based on our unique inclined-gap fiber collecting system. Pseudo-parallel nanofiber arrays were used either directly for the PDMS molding process or for the metal lift-off process followed by the SiO2 deposition process to produce the nanochannel array. While the PDMS molding process was a simple fabrication based on one-step casting, the metal lift-off process followed by SiO2 deposition allowed finetuning on height and width of nanogrooves down to subhundred nanometers from a few micrometers. Nanogrooves were covered either with cover glass or with PDMS slab and nanochannel connectivity was investigated with a fluorescent dye. Also, nanochannel arrays were used to investigate mobility and conformations of lambda-DNA. English IOP PUBLISHING LTD POLYMER NANOFIBERS DNA-MOLECULES NANOFLUIDIC DEVICES BEAM LITHOGRAPHY MANIPULATION DIAMETER NANOSLIT FIBERS Lithography-free centimeter-long nanochannel fabrication method using an electrospun nanofiber array Article 10.1088/0960-1317/22/9/095019 1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.22, no.9 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22 9 scie scopus 000308210600029 2-s2.0-84866332780 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article POLYMER NANOFIBERS DNA-MOLECULES NANOFLUIDIC DEVICES BEAM LITHOGRAPHY MANIPULATION DIAMETER NANOSLIT FIBERS