Lee, HunSu Lee, YunSeong Chang, HongYoung 2024-01-20T14:03:36Z 2024-01-20T14:03:36Z 2021-09-04 2012-09 1070-664X https://pubs.kist.re.kr/handle/201004/128946 The multi-holed electrode that has been reported to enhance the electron density of the capacitively coupled plasma is now being adopted to speed up the processes. However, the discharge condition when the multi-holed electrode enhances the electron density of the discharge at fixed power is not studied. At low pressure, the multi-holed electrode increased the electron density of the plasma at fixed power. However, the multi-holed electrode is experimentally revealed to lower the electron density at high pressure. In this paper, the different roles of the multi-holed electrode are experimentally studied. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4748576] English AMER INST PHYSICS LARGE-AREA FREQUENCY ARGON FILM The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode Article 10.1063/1.4748576 1 PHYSICS OF PLASMAS, v.19, no.9 PHYSICS OF PLASMAS 19 9 scie scopus 000309401300080 2-s2.0-84866979628 Physics, Fluids & Plasmas Physics Article LARGE-AREA FREQUENCY ARGON FILM Plasma Electron density Multi-holed electrode CCP Langmuir Probe