Jung, Mi Kim, Jae Hun Lee, Seok Jang, Byung Jin Lee, Woo Young Oh, Yoo-Mi Park, Sun-Woo Woo, Deokha 2024-01-20T14:31:59Z 2024-01-20T14:31:59Z 2021-09-05 2012-07 1533-4880 https://pubs.kist.re.kr/handle/201004/129110 A significant enhancement in the light output from nano-patterned InP substrate covered with a nanoporous alumina mask was observed. A uniform nanohole array on an InP semiconductor substrate was fabricated by inductively coupled plasma reactive ion etching (ICP-RIE), using the nanoporous alumina mask as a shadow mask. The light output property of the semiconductor substrate was investigated via photoluminescence (PL) intensity measurement. The InP substrate with a nanohole array showed a more enhanced PL intensity compared with the raw InP substrate without a nanohole structure. After ICP-RIE etching, the light output from the nanoporous InP substrate covered with a nanoporous alumina mask showed fourfold enhanced PL intensity compared with the raw InP substrate. These results can be used as a prospective method for increasing the light output efficiency of optoelectronic devices. English AMER SCIENTIFIC PUBLISHERS 2-DIMENSIONAL PHOTONIC CRYSTAL EMITTING-DIODES EXTRACTION EFFICIENCY BAND-GAP SURFACE ARRAYS FABRICATION GAAS Enhanced Light Output from the Nano-Patterned InP Semiconductor Substrate Through the Nanoporous Alumina Mask Article 10.1166/jnn.2012.6252 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.7, pp.5747 - 5753 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 12 7 5747 5753 scie scopus 000307604700116 2-s2.0-84865152486 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article 2-DIMENSIONAL PHOTONIC CRYSTAL EMITTING-DIODES EXTRACTION EFFICIENCY BAND-GAP SURFACE ARRAYS FABRICATION GAAS Light Output Efficiency InP Nanohole Photoluminescence Nanoporous Alumina Mask