Moon, Hi Gyu Shim, Young-Seok Kim, Do Hong Jang, Ho Won Han, Seung-Hee Park, Hyung-Ho Yoon, Soek-Jin 2024-01-20T15:03:02Z 2024-01-20T15:03:02Z 2021-09-05 2012-04 1533-4880 https://pubs.kist.re.kr/handle/201004/129365 We report a novel process that uses highly ordered colloidal templating to fabricate nanostructured TiO2 thin film gas sensors. An O-2 plasma treatment is used to decrease the contact angle of a water droplet on a SiO2/Si substrate from 46 degrees to 3 degrees. The formation of this hydrophilic surface enhances the adhesion of polystyrene microspheres to the substrate during the spin coating of the colloidal solution, leading to a large-area colloid template of closely packed monolayer microspheres on the substrates. Embossed TiO2 thin film gas sensors fabricated through highly ordered colloidal templating using O-2 plasma exhibit substantially enhanced gas sensing performance as compared to those without surface treatments prior to colloidal templating. English AMER SCIENTIFIC PUBLISHERS HOLLOW HEMISPHERES SENSING PROPERTIES TIN OXIDE Highly Ordered Large-Area Colloid Templates for Nanostructured TiO2 Thin Film Gas Sensors Article 10.1166/jnn.2012.5589 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.4, pp.3496 - 3500 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 12 4 3496 3500 scie scopus 000305850900105 2-s2.0-84863329809 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article; Proceedings Paper HOLLOW HEMISPHERES SENSING PROPERTIES TIN OXIDE Gas Sensor TiO2 Colloid Template O-2 Plasma Hollow Hemispheres