Kim, Kyoungwon Kim, Sangsig Lee, Sang Yeol 2024-01-20T15:05:28Z 2024-01-20T15:05:28Z 2021-09-05 2012-03 1567-1739 https://pubs.kist.re.kr/handle/201004/129463 Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH3COO)(2)], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (lambda = 248, KrF) source with energy density of 50 mJ/cm(2) for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature. (C) 2011 Elsevier B.V. All rights reserved. English ELSEVIER ZINC-OXIDE Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method Article 10.1016/j.cap.2011.09.006 1 CURRENT APPLIED PHYSICS, v.12, no.2, pp.585 - 588 CURRENT APPLIED PHYSICS 12 2 585 588 scie scopus kci ART001644489 000297003600040 2-s2.0-81155123054 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article ZINC-OXIDE ZnO Excimer laser Laser annealing