Joe, Minwoong Moon, Myoung-Woon Oh, Jungsoo Lee, Kyu-Hwan Lee, Kwang-Ryeol 2024-01-20T15:32:40Z 2024-01-20T15:32:40Z 2021-09-04 2012-02 0008-6223 https://pubs.kist.re.kr/handle/201004/129611 The morphological evolution of an amorphous carbon film deposited by energetic carbon atoms of 75 eV with various angles of incidence was investigated by molecular dynamics simulation. Normal or near-normal incidence of carbon atoms resulted in a smooth surface of the deposited film. In contrast, a bump-like surface structure emerged and led to rough surfaces at grazing incidences, in agreement with the experiments. The bifurcated growth mode was explained by the impact-induced transport of atoms on the growing surface. The downhill transport of atoms on a sloping surface dominates at normal incidence, which suppresses the evolution of surface irregularities to form a rough surface. However, the dominance of uphill transport at a grazing incidence made the surface irregularities grow to a seed structure, which provided the shadowing effect during carbon deposition. This mechanism mediates initial seed formation and subsequent roughening together with shadowing effects under grazing incidence. (C) 2011 Elsevier Ltd. All rights reserved. English PERGAMON-ELSEVIER SCIENCE LTD GLANCING ANGLE DEPOSITION THIN-FILMS DIAMOND MECHANISM Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms Article 10.1016/j.carbon.2011.08.053 1 CARBON, v.50, no.2, pp.404 - 410 CARBON 50 2 404 410 scie scopus 000297397700007 2-s2.0-80055093112 Chemistry, Physical Materials Science, Multidisciplinary Chemistry Materials Science Article GLANCING ANGLE DEPOSITION THIN-FILMS DIAMOND MECHANISM DLC GLAD MD Simulation