Oh, S.M. Kang, M.-G. Do, Y.H. Kang, C.Y. Yoon, S.J. Nahm, S. 2024-01-20T16:05:10Z 2024-01-20T16:05:10Z 2021-09-02 2011-10 1229-7607 https://pubs.kist.re.kr/handle/201004/129968 Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm. ？ 2011 KIEEME. All rights reserved. English Korean Institute of Electrical and Electronic Material Engineers Condensation reactions Dielectric losses Gels Heat treatment Semiconducting lead compounds Sol-gels Sols Zirconium After-heat treatment Alkoxide solutions Crack free Gel films Lead zirconate titanate Lead zirconium titanate Lead-zirconate-titanate films Molar ratio N vinylpyrrolidone Poly(vinyl pyrrolidone) Poly-N-vinylpyrrolidone PZT film Sol-gel process Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method Article 10.4313/TEEM.2011.12.5.222 1 Transactions on Electrical and Electronic Materials, v.12, no.5, pp.222 - 225 Transactions on Electrical and Electronic Materials 12 5 222 225 scopus kci ART001596411 2-s2.0-84930482590 Article Condensation reactions Dielectric losses Gels Heat treatment Semiconducting lead compounds Sol-gels Sols Zirconium After-heat treatment Alkoxide solutions Crack free Gel films Lead zirconate titanate Lead zirconium titanate Lead-zirconate-titanate films Molar ratio N vinylpyrrolidone Poly(vinyl pyrrolidone) Poly-N-vinylpyrrolidone PZT film Sol-gel process Lead zirconate titanate Poly(vinylpyrrolidone) Sol-gel Thickness control