Park, Ji Hun Jang, Samseok Byun, Dongjin Lee, Joong Kee 2024-01-20T16:32:25Z 2024-01-20T16:32:25Z 2021-09-05 2011-08-01 0040-6090 https://pubs.kist.re.kr/handle/201004/130086 The undoped and fluorine doped gallium tin oxide composite films are prepared by an electron cyclotron resonance metal organic chemical vapor deposition. Characteristics of structural, optical and electrical properties of the fluorine doped gallium tin oxide composite thin films are investigated. The four point probe method, atomic force microscopy and X-ray photoelectron spectroscopy are employed to characterize the composite thin films. UV-visible. X-ray diffraction, scanning electron microscope and Hall measurement performed on fluorine doped gallium tin oxide composite are films deposited on polyethylene terephthalate substrates. The diffraction pattern shows the presence of tetragonal structure with (112) special orientation for fluorine doped gallium tin oxide composite films. The doped composite film on F/Ga + Sn mole ratio of 0.35 is observed the lowest electrical resistivity of 3.35 x 10(-4) Omega cm. (C) 2011 Published by Elsevier B.V. English ELSEVIER SCIENCE SA THIN-FILMS OPTICAL-PROPERTIES Fluorine doped gallium tin oxide composite films as transparent conductive oxides on polyethylene terephthalate film prepared by electron cyclotron resonance metal organic chemical vapor deposition Article 10.1016/j.tsf.2011.04.048 1 THIN SOLID FILMS, v.519, no.20, pp.6863 - 6867 THIN SOLID FILMS 519 20 6863 6867 scie scopus 000294790900049 2-s2.0-80051544458 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper THIN-FILMS OPTICAL-PROPERTIES ECR-CVD Electrical and optical properties Texture coefficient Composite film