Jung, Sung-Mok Kim, Young-Hwan Kim, Seong-Il Yoo, Sang-Im 2024-01-20T17:03:20Z 2024-01-20T17:03:20Z 2021-09-02 2011-05 1567-1739 https://pubs.kist.re.kr/handle/201004/130385 ZnS and ZnS-MgF2 composite films were prepared on soda-lime glass substrates and MgF2 films on GaAs by rf magnetron sputtering to investigate multi-layer antireflection (AR) coatings. Optical constants of these films were determined by envelope method and spectroscopic ellipsometry. In particular, ZnS-MgF2 composite films were fabricated by co-sputtering of ZnS and MgF2 target to obtain intermediate refractive index material for a middle layer in the triple-layer AR coating and these films exhibited the desired intermediate refractive index. Based on the extracted optical constants, single-, double- and triple-layer AR coatings on GaAs substrates were designed and fabricated by rf magnetron sputtering. Low reflectance could be obtained from single-layer AR coating only at a specific wavelength and could be obtained from multi-layer AR coating at wide wavelength regime. Additionally, incident angle dependence of the reflectance of the multi-layer AR coatings was also investigated and showed different behavior according to a number of layers. (C) 2010 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV THIN-FILMS OPTICAL-PROPERTIES POROUS SILICON TEMPERATURE EVAPORATION DEPOSITION THICKNESS CONSTANTS Design and fabrication of multi-layer antireflection coating for III-V solar cell Article 10.1016/j.cap.2010.09.010 1 CURRENT APPLIED PHYSICS, v.11, no.3, pp.538 - 541 CURRENT APPLIED PHYSICS 11 3 538 541 scie scopus kci ART001553412 000288183300050 2-s2.0-79951670848 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article THIN-FILMS OPTICAL-PROPERTIES POROUS SILICON TEMPERATURE EVAPORATION DEPOSITION THICKNESS CONSTANTS Zinc sulfide Magnesium fluoride Antireflection coating Optical constants rf magnetron sputtering