Byun, Jun Seok Han, Seung Ho Ghong, Tae Ho Kim, Young Dong Chung, Jin Mo Song, Jin Dong 2024-01-20T17:30:30Z 2024-01-20T17:30:30Z 2021-09-02 2011-04 0374-4884 https://pubs.kist.re.kr/handle/201004/130498 Data obtained by spectroscopic ellipsometry (SE) on a random array of oxide-coated In As quantum clots (QDs) are analyzed by rigorous coupled-wave analysis (RCWA). RWCA is an important method of precisely determining the geometric parameters of patterned periodic structures, but has been applied only rarely to random systems and not previously to a random distribution of QDs covered with an oxide overlayer. We find our model calculations to be in reasonable agreement with data, showing that RCWA is a useful approach for extracting average values of the size, interval, distribution density, shape, and possibly composition of QD structures even when not periodically arranged. English KOREAN PHYSICAL SOC SURFACE-RELIEF GRATINGS COUPLED-WAVE ANALYSIS MULTILAYER FILM IMPLEMENTATION FORMULATION METROLOGY EPITAXY Analysis of Randomly Spaced Quantum Dots with Oxide Overlayers Using Spectroscopic Ellipsometry Article 10.3938/jkps.58.943 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.58, no.4, pp.943 - 946 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 58 4 943 946 scie scopus kci ART001545065 000289611600018 2-s2.0-79955052251 Physics, Multidisciplinary Physics Article; Proceedings Paper SURFACE-RELIEF GRATINGS COUPLED-WAVE ANALYSIS MULTILAYER FILM IMPLEMENTATION FORMULATION METROLOGY EPITAXY RCWA Spectroscopic ellipsometry Quantum dot