Kwon, Chang-Woo Son, Ji-Won Lee, Jong-Ho Kim, Hyun-Mi Lee, Hae-Weon Kim, Ki-Bum 2024-01-20T17:30:49Z 2024-01-20T17:30:49Z 2021-09-02 2011-03-22 1616-301X https://pubs.kist.re.kr/handle/201004/130513 Micro-solid oxide fuel cells (mu-SOFCs) are fabricated on nanoporous anodic aluminum oxide (AAO) templates with a cell structure composed of a 600-nm-thick AAO free-standing membrane embedded on a Si substrate, sputter-deposited Pt electrodes (cathode and anode) and an yttria-stabilized zirconia (YSZ) electrolyte deposited by pulsed laser deposition (PLD). Initially, the open circuit voltages (OCVs) of the AAO-supported mu-SOFCs are in the range of 0.05 V to 0.78 V, which is much lower than the ideal value, depending on the average pore size of the AAO template and the thickness of the YSZ electrolyte. Transmission electron microscopy (TEM) analysis reveals the formation of pinholes in the electrolyte layer that originate from the porous nature of the underlying AAO membrane. In order to clog these pinholes, a 20-nm thick Al2O3 layer is deposited by atomic layer deposition (ALD) on top of the 300-nm thick YSZ layer and another 600-nm thick YSZ layer is deposited after removing the top intermittent Al2O3 layer. Fuel cell devices fabricated in this way manifest OCVs of 1.02 V, and a maximum power density of 350 mW cm(-2) at 500 degrees C. English WILEY-V C H VERLAG GMBH ATOMIC LAYER DEPOSITION YSZ THIN-FILMS ELECTROLYTE SOFC High-Performance Micro-Solid Oxide Fuel Cells Fabricated on Nanoporous Anodic Aluminum Oxide Templates Article 10.1002/adfm.201002137 1 ADVANCED FUNCTIONAL MATERIALS, v.21, no.6, pp.1154 - 1159 ADVANCED FUNCTIONAL MATERIALS 21 6 1154 1159 scie scopus 000288559100018 2-s2.0-79952819892 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article ATOMIC LAYER DEPOSITION YSZ THIN-FILMS ELECTROLYTE SOFC anodic aluminum oxide atomic layer deposition porous materials solid oxide fuel cells thin films