이지혜 김강진 이연희 2024-01-20T17:31:39Z 2024-01-20T17:31:39Z 2022-01-10 2011-03 1341-1756 https://pubs.kist.re.kr/handle/201004/130553 Characterization of fluorocarbon thin films deposited by ICP and PP Article 3 Journal of Surface Analysis, v.17, no.3, pp.269 - 273 Journal of Surface Analysis 17 3 269 273 plasma polymerization ICP PP fluorocarbon thin film