Seok, Hyun-Kwang Choi, Eun Young Cha, Pil-Ryung Son, Myung-Chan Choi, Byoung Lyong 2024-01-20T17:33:11Z 2024-01-20T17:33:11Z 2021-09-02 2011-02-25 0257-8972 https://pubs.kist.re.kr/handle/201004/130630 Yttria (Y2O3) has been commonly used as a protective coating material because it has strong resistance to plasma erosion with reducing the amount of reaction products generated during the semiconductor/LCD fabrication process. We have investigated the visual aspect of the plasma-sprayed Y2O3 coating both experimentally and numerically to propose the process conditions proper for white Y2O3 coating. It was demonstrated that heating of the particle surface in oxygen deficient plasma jet core resulted in the reduction of coating materials associated with the formation of black spots, while the re-oxidation of reduced feed stock materials at long spray distance, where they were exposed to relatively lower temperature of plasma and abundant oxygen, caused the whitening of coating. Based on the results, we proposed a spray coating condition proper for reducing the black spots formed in protective Y2O3 ceramic coating. (C) 2010 Published by Elsevier B.V. English ELSEVIER SCIENCE SA THERMAL-CONDUCTIVITY DIFFUSIVITY CERAMICS VELOCITY JETS AIR Characterization of plasma-sprayed Y2O3 coating and investigation of its visual aspect change Article 10.1016/j.surfcoat.2010.10.045 1 SURFACE & COATINGS TECHNOLOGY, v.205, no.11, pp.3341 - 3346 SURFACE & COATINGS TECHNOLOGY 205 11 3341 3346 scie scopus 000287906900001 2-s2.0-79952760466 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article THERMAL-CONDUCTIVITY DIFFUSIVITY CERAMICS VELOCITY JETS AIR Y2O3 coating Black spot Plasma spray coating Semi-conductor fabrication equipment Visual aspect