Cho, Il-Joo Yun, Kwang Seok Nam, Hyo-Jin 2024-01-20T18:01:26Z 2024-01-20T18:01:26Z 2021-09-02 2011-01 1975-0102 https://pubs.kist.re.kr/handle/201004/130780 A new high speed AFM probe has been proposed and fabricated. The probe is integrated with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process. Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast imaging. The resonant frequency of the fabricated probe is 92.9 kHz and the maximum deflection is 5.3 mu m at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM system at the scan speed of 600 mu m/sec English KOREAN INST ELECTR ENG ATOMIC-FORCE MICROSCOPY CANTILEVERS A High-Speed Single Crystal Silicon AFM Probe Integrated with PZT Actuator for High-Speed Imaging Applications Article 10.5370/JEET.2011.6.1.119 1 JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY, v.6, no.1, pp.119 - 122 JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY 6 1 119 122 scie scopus kci ART001502664 000285696300016 Engineering, Electrical & Electronic Engineering Article ATOMIC-FORCE MICROSCOPY CANTILEVERS AFM Probe PZT Actuator Boron Cantilever Bio imaging