Jung, Keun Shin, Dong Wook Yoon, Seok-Jin Choi, Ji-Won Choi, Won-Kook Song, Jong-Han Kim, Hyun Jae 2024-01-20T18:32:23Z 2024-01-20T18:32:23Z 2021-09-05 2010-10 0374-4884 https://pubs.kist.re.kr/handle/201004/131063 Al-doped ZnO (AZO) thin films were deposited on glass substrates at room temperature by using the continuous composition spread (CCS) method. CCS is a thin-film growth method for various Al(x)Zn(1-x)O thin film compositions with a binary or ternary composition spread, and the critical properties can be evaluated as functions of position, which is directly related to material composition, by using an automated probe station.. Various compositions of Al-doped ZnO thin films deposited at room temperature were explored to find excellent electrical and optical properties. The lowest resistivity of the AZO thin films deposited at room temperature was 2.8 x 10(-3) Omega.cm, and the average transmittance in the 400-to-900-nm wavelength region was 93%. The optimized composition of the AZO thin film, which had the lowest resistivity and highest transmittance was Al(0.05)Zn(1)O(1.05) (about 3.13-wt% Al(2)O(3)). English KOREAN PHYSICAL SOC PULSED-LASER DEPOSITION SOLAR-CELLS Electrical and Optical Properties of Al-doped Zinc-oxide Thin Films Deposited at Room Temperature by Using the Continuous Composition Spread Method Article 10.3938/jkps.57.1092 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.57, no.4, pp.1092 - 1095 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 57 4 1092 1095 scie scopus kci ART001489044 000283109000055 2-s2.0-78149479129 Physics, Multidisciplinary Physics Article PULSED-LASER DEPOSITION SOLAR-CELLS Continuous composition spread Thin films Transparent conducting oxides Al-doped ZnO