Lim, Jun Shin, Hyun-Joon Chae, Keun Hwa Hwang, Chan-Cuk Hwang, Han-Na Hong, Chung Ki 2024-01-20T19:04:14Z 2024-01-20T19:04:14Z 2021-09-02 2010-06 0034-6748 https://pubs.kist.re.kr/handle/201004/131398 A full-field transmission soft x-ray microscope (TXM) was developed at the Pohang Light Source. With a 2 mm diameter condenser zone plate and a 40 nm outermost-zone-width objective zone plate, the TXM's achieved spatial resolution is better than 50 nm at the photon energy of 500 eV (wavelength: 2.49 nm). The TXM is portable and mounted in tandem with a 7B1 spectroscopy end station. The sample position is outside the vacuum, allowing for quick sample changes and enhanced in situ experimental capability. In addition, the TXM is pinhole-free and easy to align, having commercial mounts located outside the vacuum components. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3432000] English AMER INST PHYSICS RESOLUTION TOMOGRAPHY A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source Article 10.1063/1.3432000 1 REVIEW OF SCIENTIFIC INSTRUMENTS, v.81, no.6 REVIEW OF SCIENTIFIC INSTRUMENTS 81 6 scie scopus 000280102200023 2-s2.0-77954210745 Instruments & Instrumentation Physics, Applied Instruments & Instrumentation Physics Article RESOLUTION TOMOGRAPHY full-field transmission soft x-ray microscope Synchrotron radiation beamline