Lee, Soo Hyun Jung, Jung Hwan Chae, Youn Mee Suh, Jun-Kyo Francis Kang, Ji Yoon 2024-01-20T19:34:58Z 2024-01-20T19:34:58Z 2021-09-02 2010-03 0960-1317 https://pubs.kist.re.kr/handle/201004/131680 This paper presents the fabrication and characterization of implantable and flexible nerve cuff electrodes for neural interfaces using the conventional BioMEMS technique. In order to fabricate a flexible nerve electrode, polyimide (PI) was chosen as the substrate material. Then, nerve electrodes were thermally re-formed in a cuff shape so as to increase the area in which the charges were transferred to the nerve. Platinum (Pt), iridium (Ir) and iridium oxide (IrOx) films, which were to serve as conducting materials for the nerve electrodes, were deposited at different working pressures by RF magnetron sputtering. The electrochemical properties of the deposited films were characterized by electrochemical impedance spectroscopy (EIS). The charge delivery capacities of the films were recorded and calculated by cyclic voltammetry (CV). The deposited films of Pt, Ir and IrOx have strong differences in electrochemical properties, which depend on the working pressure of sputter. Each film deposited at 30 mTorr of working pressure shows the highest value of charge delivery capacity (CDC). For the IrOx films, the electrochemical properties were strongly affected by the working pressure as well as the Ar:O-2 gas ratio. The IrOx film deposited with an Ar:O-2 gas ratio of 8:1 showed the highest CDC of 59.5 mC cm(-2), which was about five times higher than that of films deposited with a 1:1 gas ratio. English IOP PUBLISHING LTD IRIDIUM OXIDE-FILMS CHARGE-INJECTION STIMULATION MICROELECTRODES RECORDINGS POLYMERS PULSES ARRAYS Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir and IrOx films deposited by RF sputtering Article 10.1088/0960-1317/20/3/035015 1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.20, no.3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20 3 scie scopus 000275331300015 2-s2.0-77749309845 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article IRIDIUM OXIDE-FILMS CHARGE-INJECTION STIMULATION MICROELECTRODES RECORDINGS POLYMERS PULSES ARRAYS Nerve electrode flexible Platinum Iridium Iridium oxide