Jee, Y. Chang, I. Son, J.-W. Lee, J.-H. Kang, S. Cha, S.W. 2024-01-20T20:03:20Z 2024-01-20T20:03:20Z 2021-09-02 2010-01 1229-7801 https://pubs.kist.re.kr/handle/201004/131845 Recently, thin film processes for oxides and metal deposition, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), have been widely adapted to fabricate solid oxide fuel cells (SOFCs). In this paper, we presented two research area of the use of such techniques. Gadolinium doped ceria (GDC) showed high ionic conductivity and could guarantee operation at low temperature. But the electron conductivity at low oxygen partial pressure and the weak mechanical property have been significant problems. To solve these issues, we coated GDC electrolyte with a nano scale yittria-doped stabilized zirconium (YSZ) layer via atomic layer deposition (ALD). We expected that the thin YSZ layer could have functions of electron blocking and preventing ceria from the reduction atmosphere. Yittria-doped barium zirconium (BYZ) has several orders higher proton conductivity than oxide ion conductor as YSZ and also has relatively high chemical stability. The fabrication processes of BYZ is very sophisticated, especially the synthesis of thin-film BYZ. We discussed the detailed fabrication processes of BYZ as well as the deposition of electrode. This paper discusses possible cell structure and process flow to accommodate such films. English ALD Bi-layer BYZ GDC PLD SOFC YSZ Atomic layer deposition Barium Cerium compounds Chemical stability Deposition Fabrication Gadolinium Ionic conduction Mechanical properties Oxide films Oxygen Physical vapor deposition Solid oxide fuel cells (SOFC) Thin films Zirconium Chemical vapor deposition Fabrication of thin solid oxide film fuel cells Article 10.4191/KCERS.2010.47.1.082 1 Journal of the Korean Ceramic Society, v.47, no.1, pp.82 - 85 Journal of the Korean Ceramic Society 47 1 82 85 scopus kci ART001416862 2-s2.0-78649898787 Article ALD Bi-layer BYZ GDC PLD SOFC YSZ Atomic layer deposition Barium Cerium compounds Chemical stability Deposition Fabrication Gadolinium Ionic conduction Mechanical properties Oxide films Oxygen Physical vapor deposition Solid oxide fuel cells (SOFC) Thin films Zirconium Chemical vapor deposition ALD Bi-layer BYZ GDC PLD SOFC Thin film YSZ