Pham Duc Cuong 나경환 Van Hung Pham 윤의성 2024-01-20T20:04:31Z 2024-01-20T20:04:31Z 2022-01-10 2009-12 1229-9189 https://pubs.kist.re.kr/handle/201004/131900 The Korean society of tribologists & lubrication engineers Hydrophobicity and Nanotribological Properties of Silicon Channels coated by Diamond-like Carbon Films Article 3 KSTLE international journal, v.10, no.1/2, pp.1 - 5 KSTLE international journal 10 1/2 1 5 surface modification channels DLC tribology AFM