윤장호 최우천 강종윤 윤석진 강진규 2024-01-20T20:30:58Z 2024-01-20T20:30:58Z 2021-09-06 2009-11 1225-5475 https://pubs.kist.re.kr/handle/201004/131978 This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of 3/2％. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of 20×10×1 mm size and confirmed the flexural vibration of the 3/2％ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage. Korean 한국센서학회 굴곡 진동모드를 이용한 초음파 선형 압전 액추에이터 개발 Development of ultrasonic linear piezoelectric actuator with flexuralvibration mode Article 2 센서학회지, v.18, no.6, pp.461 - 466 센서학회지 18 6 461 466 kci ART001391723 linear actuator flexural vibration piezoelectric actuator ATILA