Li, H. Lee, Hak-Joo Park, Jong-Keuk Baik, Young-Joon Hwang, Gyu Weon Jeong, Jeung-hyun Lee, Wook-Seong 2024-01-20T20:31:36Z 2024-01-20T20:31:36Z 2021-09-04 2009-11 0925-9635 https://pubs.kist.re.kr/handle/201004/132010 Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH4/N-2 concentrations in H-2, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere. (C) 2009 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD Article 10.1016/j.diamond.2009.08.009 1 DIAMOND AND RELATED MATERIALS, v.18, no.11, pp.1369 - 1374 DIAMOND AND RELATED MATERIALS 18 11 1369 1374 N scie scopus 000271257100007 2-s2.0-71749102386 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article CHEMICAL-VAPOR-DEPOSITION RAMAN-SPECTROSCOPY PRESSURE GROWTH Nanocrystalline diamond film Hot filament CVD Bias growth