Lee, Chan Woo Kim, Jun Woo Lee, Jae-Hyoung Ahn, Kwang-Duk 2024-01-20T20:33:47Z 2024-01-20T20:33:47Z 2021-09-04 2009-10 1381-5148 https://pubs.kist.re.kr/handle/201004/132115 A cyanato-functional maleimide monomer (CyOPMI) was radically copolymerized with N-[4-(tetrahydropyranyloxy)phenyl]maleimide (THPPMI) and methyl methacrylate (MMA) to obtain reactive cyanate polymers along with acid-labile THP-protecting groups. The soluble copolymers of CyOPMI employed, as cyanato-imidopolymers, were converted to the insoluble polymers by thermal or photo-acid treatment based on the acid-catalyzed deprotection of THP groups and cyclotrimerization of the pendent cyanto groups to form a crosslinked triazine structure (cyanurate). Upon this selective post-crosslinking, the cyanato-polymers were applied to negative-tone photoimaging by photolithography. CyOPMI was radically copolymerized with various vinyl monomers such as MMA, styrenes (St) and alkyl vinyl ethers (R'VE) to obtain soluble polymers by controlling the monomer feed ratios and polymerization conditions. The high thermal properties of the cyanato-imido polymers were attributed to the curing characteristics of the pendant cyanatophenyl and imidophenolic groups. (C) 2009 Elsevier Ltd. All rights reserved. English ELSEVIER SCIENCE BV PHOTOCHEMICAL ACID GENERATION PROTECTED BLOCK-COPOLYMERS BIFUNCTIONAL MALEIMIDES CHEMICAL AMPLIFICATION RESIST MATERIALS ESTER RESINS POLYMERIZATION POLYMERS SYSTEMS PHOTOPOLYMERIZATION Synthesis of cyanato-functional polymaleimides and their application in negative-tone photoimaging by post-crosslinking Article 10.1016/j.reactfunctpolym.2009.06.001 1 REACTIVE & FUNCTIONAL POLYMERS, v.69, no.10, pp.737 - 742 REACTIVE & FUNCTIONAL POLYMERS 69 10 737 742 scie scopus 000270162000001 2-s2.0-68949158440 Chemistry, Applied Engineering, Chemical Polymer Science Chemistry Engineering Polymer Science Article PHOTOCHEMICAL ACID GENERATION PROTECTED BLOCK-COPOLYMERS BIFUNCTIONAL MALEIMIDES CHEMICAL AMPLIFICATION RESIST MATERIALS ESTER RESINS POLYMERIZATION POLYMERS SYSTEMS PHOTOPOLYMERIZATION Functional maleimide monomers Functional maleimide polymers Cyanato-phenylmaleimide Cyanate resins Deprotection of polymers Crosslinking Negative photoimaging