Shin, Dong Wook Gupta, Ravindra K. Choi, Won-Kook Cho, Yong Soo Yoon, Seok-Jin Choi, Ji-Won 2024-01-20T21:04:47Z 2024-01-20T21:04:47Z 2021-09-03 2009-07 0021-4922 https://pubs.kist.re.kr/handle/201004/132366 LiMn2O4 thin films grown on a Pt/Ti/SiO2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target-substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery. (C) 2009 The Japan Society of Applied Physics English JAPAN SOC APPLIED PHYSICS RECHARGEABLE LITHIUM BATTERIES ELECTRODES Dependence of Processing Parameters on Structural Properties and Microstructures of Pulsed Laser Deposited LiMn2O4 Thin Films Article 10.1143/JJAP.48.075501 1 JAPANESE JOURNAL OF APPLIED PHYSICS, v.48, no.7 JAPANESE JOURNAL OF APPLIED PHYSICS 48 7 scie scopus 000268546100057 2-s2.0-72049088240 Physics, Applied Physics Article RECHARGEABLE LITHIUM BATTERIES ELECTRODES Thin Film Battery Cathode LiMn2O4 Pulsed Laser Deposition