Kim, Y. H. Lee, K. S. Lee, T. S. Cheong, B. Seong, T. -Y. Kim, W. M. 2024-01-20T21:30:54Z 2024-01-20T21:30:54Z 2021-09-03 2009-05-30 0169-4332 https://pubs.kist.re.kr/handle/201004/132472 Al-doped ZnO (AZO) films prepared at different substrate temperature and AZO films with intentional Zn addition (ZAZO) during deposition at elevated substrate temperature were fabricated by radio frequency magnetron sputtering on glass substrate, and the resulting structural, electrical, optical properties together with the etching characteristics and annealing behavior were comparatively examined. AZO films deposited at 150 degrees C showed the optimum electrical properties and the largest grain size. XPS analysis revealed that AZO films deposited at elevated temperature of 450 degrees C contained large amount of Al content due to Zn deficiency, and that intentional Zn addition during deposition could compensate the deficiency of Zn to some extent. It was shown that the electrical, optical and structural properties of ZAZO films were almost comparable to those of AZO film deposited at 150 degrees C, and that ZAZO films had much smaller etching rate together with better stability in severe annealing conditions than AZO films due possibly to formation of dense structure. (C) 2009 Elsevier B. V. All rights reserved. English ELSEVIER SCIENCE BV ZINC-OXIDE FILMS TRANSPARENT CONDUCTING OXIDES SUPERSTRATE SOLAR-CELLS THIN-FILMS HIGHLY TRANSPARENT BAND-GAP RF DEPOSITION Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering Article 10.1016/j.apsusc.2009.03.075 1 APPLIED SURFACE SCIENCE, v.255, no.16, pp.7251 - 7256 APPLIED SURFACE SCIENCE 255 16 7251 7256 scie scopus 000266097500024 2-s2.0-67349207385 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article ZINC-OXIDE FILMS TRANSPARENT CONDUCTING OXIDES SUPERSTRATE SOLAR-CELLS THIN-FILMS HIGHLY TRANSPARENT BAND-GAP RF DEPOSITION Al-doped ZnO Magnetron sputtering Deposition temperature Zn addition Transparent conducting oxide