Yi, Jin Woo Park, Se Jun Moon, Myoung-Woon Lee, Kwang-Ryeol Kim, Seock-Sam 2024-01-20T21:31:20Z 2024-01-20T21:31:20Z 2021-09-01 2009-05-15 0169-4332 https://pubs.kist.re.kr/handle/201004/132490 This study examined the friction and wear behavior of diamond-like carbon (DLC) films deposited from a radio frequency glow discharge using a hydrogen diluted benzene gas mixture. The DLC films were deposited on Si (1 0 0) and polished stainless steel substrates by radio frequency plasma-assisted chemical vapor deposition (r.f.-PACVD) at hydrogen to benzene ratios, or the hydrogen dilution ratio, ranging from 0 to 2.0. The wear test was carried out in both ambient and aqueous environments using a homemade ball-on-disk type wear rig. The stability of the DLC coating in an aqueous environment was improved by diluting the benzene precursor gas with hydrogen, suggesting that hydrogen dilution during the deposition of DLC films suppressed the initiation of defects in the film and improved the adhesion of the coating to the interface. (c) 2009 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV DLC FILM BIOMEDICAL APPLICATIONS AMORPHOUS-CARBON ION-IMPLANTATION STAINLESS-STEEL COATINGS BIOCOMPATIBILITY MECHANISM SILICON Defect effect on tribological behavior of diamond-like carbon films deposited with hydrogen diluted benzene gas in aqueous environment Article 10.1016/j.apsusc.2009.03.031 1 APPLIED SURFACE SCIENCE, v.255, no.15, pp.7005 - 7011 APPLIED SURFACE SCIENCE 255 15 7005 7011 scie scopus 000265906300043 2-s2.0-67349257385 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article DLC FILM BIOMEDICAL APPLICATIONS AMORPHOUS-CARBON ION-IMPLANTATION STAINLESS-STEEL COATINGS BIOCOMPATIBILITY MECHANISM SILICON DLC Hydrogen dilution Aqueous environment Spallation wear Defect