Jung, Y. W. Byun, J. S. Woo, D. H. Kim, Y. D. 2024-01-20T21:31:27Z 2024-01-20T21:31:27Z 2021-09-03 2009-05-01 0040-6090 https://pubs.kist.re.kr/handle/201004/132495 We performed an ellipsometric study of porous anodized aluminum oxide (AAO) films on Si substrates. Regular cylindrical porous AAO films with flat bottom structure were formed by chemical etching and anodization. The data showed typical interference oscillations as a result of the transparent characteristics of the film throughout the visible spectral range. We applied a combined effective medium approximation model with anisotropic model to obtain optical properties of the films, which can be used as basic information applicable for more complex structures. (C) 2009 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA SPECTROSCOPIC ELLIPSOMETRY PHOTONIC CRYSTALS PHOSPHORIC-ACID Ellipsometric analysis of porous anodized aluminum oxide films Article 10.1016/j.tsf.2008.12.051 1 THIN SOLID FILMS, v.517, no.13, pp.3726 - 3730 THIN SOLID FILMS 517 13 3726 3730 scie scopus 000266148800020 2-s2.0-64349123128 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article SPECTROSCOPIC ELLIPSOMETRY PHOTONIC CRYSTALS PHOSPHORIC-ACID Ellipsometry Anodized aluminum oxide Optical properties Anisotropy