Moon, Myoung-Woon Han, Jun Hyun Vaziri, Ashkan Her, Eun Kyu Oh, Kyu Hwan Lee, Kwang-Ryeol Hutchinson, John W. 2024-01-20T21:35:17Z 2024-01-20T21:35:17Z 2021-09-03 2009-03-18 0957-4484 https://pubs.kist.re.kr/handle/201004/132649 We show that focused ion beam irradiation results in the creation of peculiar one- and two-dimensional nanoscale features on the surface of polyimide-a common polymer in electronics, large scale structures, and the automobile industry, as well as in biomedical applications. The role of ion beam incident angle, acceleration voltage, and fluence on the morphology of the structural features is systematically investigated, and insights into the mechanisms of formation of these nanoscale features are provided. Moreover, by using the maskless patterning method of the focused ion beam system, we have developed a robust technique for controlled modification of the polymeric surface. The technique, which is analogous to using a gray glass with varying darkness to control the radiation from the sun, but at a much smaller scale, enables the ion intensity and angle to be controlled at each surface point of the polymer, giving rise to structural surface features with desired shape and morphology. English IOP PUBLISHING LTD WRINKLING PATTERNS BOMBARDMENT POLYIMIDE SKINS Nanoscale ripples on polymers created by a focused ion beam Article 10.1088/0957-4484/20/11/115301 1 NANOTECHNOLOGY, v.20, no.11 NANOTECHNOLOGY 20 11 scie scopus 000263719900005 2-s2.0-65449166468 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Science & Technology - Other Topics Materials Science Physics Article WRINKLING PATTERNS BOMBARDMENT POLYIMIDE SKINS ripple polyimide ion beam FIB maskless patterning incident angle polymer nano pattern nano patterning