Min, Hyung Seob Yang, Min Kyu Lee, Jeon-Kook 2024-01-20T22:00:36Z 2024-01-20T22:00:36Z 2021-09-03 2009-03 0734-2101 https://pubs.kist.re.kr/handle/201004/132708 Three types of low-damage radio-frequency (rf) magnetron sputtering processes-an interruptive process, a rotating cylindrical holder method, and an off-axis sputtering method-were designed and studied to reduce the film surface temperature during deposition. Low-damage sputtering processes were investigated to improve the resistivity and optical transmittance in the visible range of Al doped ZnO (AZO) thin films deposited on polymer substrates. In the case of the polyethersulfone substrate, AZO films with a resistivity of 1.0x10(-3) Omega cm and an optical transmittance of 75% were obtained by the rotating repeat holder method during rf sputtering. English A V S AMER INST PHYSICS THIN-FILM TRANSPARENT Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes Article 10.1116/1.3081966 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.27, no.2, pp.352 - 355 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 27 2 352 355 scie scopus 000264017500027 2-s2.0-61449174827 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article THIN-FILM TRANSPARENT aluminium electrical resistivity II-VI semiconductors semiconductor growth semiconductor thin films sputter deposition visible spectra wide band gap semiconductors zinc compounds