Joo, S.-H. Lee, S.-R. Cho, W.I. Cho, B.W. 2024-01-20T22:02:29Z 2024-01-20T22:02:29Z 2021-09-02 2009-02 1225-0562 https://pubs.kist.re.kr/handle/201004/132787 This study investigated the dependence of the various sputtering conditions (Ar pressure: 2-10 mTorr, Power: 50-150 W) and thickness (50-1200 nm) of Si thin film on the electrochemical properties, microstructural properties and the capacity fading of a Si thin film anode. A Si layer and a Ti buffer layer were deposited on Copper foil by RF-magnetron sputtering. At 10 mTorr, the 50 W sample showed the best capacity of 3323 mAh/g, while the 100 W sample showed the best capacity retention of 91.7%, also at 10 mTorr. The initial capacities and capacity retention in the samples apart from the 50 W sample at 10 mTorr were enhanced as the Ar pressure and power increased. This was considered to be related to the change of the microstructure and the surface morphology by various sputtering conditions. In addition, thinner Si film anodes showed better cycling performance. This phenomenon is caused by the structural stress and peeling off of the Si layer by the high volume change of Si during the charge/discharge process. Korean a-Si layers Capacity fading Capacity retention Charge/discharge Copper foils Cycling performance Deposition condition Lithium ion battery Lithium secondary batteries Microstructural properties rf-Magnetron sputtering Si film anode Si layer Silicon anode Sputtering conditions Structural stress Thin film anodes Volume change Electrochemical properties Film thickness Lithium Lithium alloys Lithium batteries Lithium compounds Silicon Thin film devices Thin films Semiconducting silicon compounds Influence of sputtering conditions on structural and electrochemical properties of the Si anode film for lithium secondary batteries Article 10.3740/MRSK.2009.19.2.073 1 Korean Journal of Materials Research, v.19, no.2, pp.73 - 78 Korean Journal of Materials Research 19 2 73 78 scopus kci ART001321147 2-s2.0-68649114141 Article a-Si layers Capacity fading Capacity retention Charge/discharge Copper foils Cycling performance Deposition condition Lithium ion battery Lithium secondary batteries Microstructural properties rf-Magnetron sputtering Si film anode Si layer Silicon anode Sputtering conditions Structural stress Thin film anodes Volume change Electrochemical properties Film thickness Lithium Lithium alloys Lithium batteries Lithium compounds Silicon Thin film devices Thin films Semiconducting silicon compounds Deposition condition Lithium ion battery Silicon anode Sputtering