문희규 송현철 김상종 최지원 강종윤 윤석진 2024-01-20T22:06:04Z 2024-01-20T22:06:04Z 2021-09-06 2008-12 1225-5475 https://pubs.kist.re.kr/handle/201004/132928 The PZT based piezoelectric thick films prepared by screen printing method have been mainly used as a functional material for MEMS applications due to their compatibility of MEMS process. However the screen printed thick films generally reveal poor electrical and mechanical properties because of their porous microstructure. To improve microstructure we mixed attrition milled powder with ball milled powder of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3- 0.35PbTiO3-0.23PbZrO3+0.1 wt% Y2O3+ 1.5 wt% ZnO composition. By mixing 25 % of attrition milled powder and 75 % of ball milled powder, the broadest particle size distribution was obtained, leading to a dense thick film with crack-free microstructure and improved dielectric properties. The X-ray diffraction analysis revealed that the film was in wellcrystallized perovskite phase. The remanent polarization was increased from 13.7 μC/cm2 to 23.3 μC/cm2 at the addition of 25 % attrition milled powder. Korean 한국센서학회 입자 크기 분포에 따른 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3 후막의 미세구조 및 압전특성 Piezoelectric properties and microstructure of 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3 thick film with particle size distribution Article 2 센서학회지, v.17, no.6, pp.418 - 424 센서학회지 17 6 418 424 kci ART001293476 piezoelectric attrition milling thick film MEMS