Shin, J. W. No, Y. S. Kim, T. W. Choi, W. K. 2024-01-20T22:33:46Z 2024-01-20T22:33:46Z 2021-09-03 2008-10 1533-4880 https://pubs.kist.re.kr/handle/201004/133096 Locally distributed crystalline ZnSiO3 nanoparticles embedded in a SiO2 layer inserted between the ZnO thin film and the Si substrate were formed using transmission electron microscopy (TEM) with a focused electron beam irradiation process. High-resolution TEM (HRTEM) images and energy dispersive X-ray spectroscopy (EDS) profiles showed that ZnSiO3 nanocrystals with a size of approximately 6 nm were formed in the SiO2 layer. The formation mechanisms of the ZnSiO3 nanocrystals in the SiO2 layer are described on the basis of the HRTEM images and the EDS profiles. English AMER SCIENTIFIC PUBLISHERS STIMULATED DESORPTION TRANSISTORS Formation and Microstructural Properties of Locally Distributed ZnSiO3 Nanoparticles Embedded in a SiO2 Layer by Using a Focused Electron Beam Article 10.1166/jnn.2008.1349 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.8, no.10, pp.5566 - 5570 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 8 10 5566 5570 scie scopus 000261390500140 2-s2.0-58149238158 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article; Proceedings Paper STIMULATED DESORPTION TRANSISTORS ZnSiO3 Nanocrystal ZnO Thin Film Si Substrate Focused Electron Beam Nanocrystal Formation Mechanism