Choi, Chang-Hak Choi, Joo-Young Cho, Kyung-Hoon Yoo, Myong-Jae Nahm, Sahn Kang, Chong-Yun Yoon, Seok-Jin Kim, Jong-Hee 2024-01-20T23:01:49Z 2024-01-20T23:01:49Z 2021-09-02 2008-08 0013-4651 https://pubs.kist.re.kr/handle/201004/133300 Te ions existed as Te(6+) in the Bi(6)Ti(5)TeO(22) (BTT) film grown at 300 degrees C under a high oxygen pressure (OP) of 80.0 Pa and contributed to the formation of the crystalline BTT phase after subsequent annealing at 600 degrees C. However, for the BTT film grown under a low OP of 53.3 Pa (or 9.33 Pa), Te(6+) ions, were converted to Te(4+) ions, which induced the phase transition of the BTT phase to the pseudo-Bi(4)Ti(3)O(12) and pseudo-Bi(2)Ti(2)O(7) phases after annealing at 600 degrees C. The leakage current density decreased with increasing OP during the growth due to the decreased number of oxygen vacancies. The breakdown voltage also improved with increasing OP during the deposition. The Mn ions introduced in the BTT films by Mn doping existed as Mn(2+) or Mn(4+) and acted as the acceptors. This Mn doping to 10 mol % also reduced the leakage current density and increased the breakdown voltage by decreasing the number of intrinsic oxygen vacancies. (C) 2008 The Electrochemical Society. English ELECTROCHEMICAL SOC INC DIELECTRIC CHARACTERIZATION BI2O3-TIO2-TEO2 SYSTEM ELECTRICAL-PROPERTIES PHASE-FORMATION MIM CAPACITORS TRANSISTORS ATMOSPHERE PYROCHLORE SUBSTRATE INSULATOR Oxygen pressure and Mn-doping effects on the structure and leakage current of Bi(6)Ti(5)TeO(22) thin film Article 10.1149/1.2960863 1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.155, no.10, pp.G199 - G202 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 155 10 G199 G202 scie scopus 000258976500050 2-s2.0-51849142269 Electrochemistry Materials Science, Coatings & Films Electrochemistry Materials Science Article DIELECTRIC CHARACTERIZATION BI2O3-TIO2-TEO2 SYSTEM ELECTRICAL-PROPERTIES PHASE-FORMATION MIM CAPACITORS TRANSISTORS ATMOSPHERE PYROCHLORE SUBSTRATE INSULATOR