Kim, Jong Hoon Du Ahn, Byung Kim, Choong Hee Jeon, Kyung All Kang, Hong Seong Lee, Sang Yeol 2024-01-20T23:35:17Z 2024-01-20T23:35:17Z 2021-08-31 2008-02-15 0040-6090 https://pubs.kist.re.kr/handle/201004/133733 Ga doped ZnO (GZO) thin films were prepared by rf-magnetron sputtering on glass substrate for window heater applications. Electrical and optical properties of these films were analyzed in order to investigate on substrate temperature and rf power dependencies. High quality GZO films with a resistivity of 1.30 x 10(-4) Omega cm and a transparency above 90% in the visible range were able to be formed. GZO films have been patterned on glass substrate as a line heater. This GZO line heater showed the rapid heat radiation property from room temperature to 90 degrees C for 22 s at the applied voltage of 42 V. These results could provide a possibility to use GZO as effective transparent heaters. (c) 2007 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA Heat generation properties of Ga doped ZnO thin films prepared by rf-magnetron sputtering for transparent heaters Article 10.1016/j.tsf.2007.03.100 1 THIN SOLID FILMS, v.516, no.7, pp.1330 - 1333 THIN SOLID FILMS 516 7 1330 1333 scie scopus 000253830300005 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper Ga doped ZnO rf-magnetron sputtering transparent heater transparent conducting oxides