Cho, P.-S. Kang, C.-Y. Kim, S.-J. Kim, J.-S. Yoon, S.-J. Van, Hieu N. Lee, J.-H. 2024-01-21T00:01:08Z 2024-01-21T00:01:08Z 2021-09-02 2008-02 1225-0562 https://pubs.kist.re.kr/handle/201004/133795 A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C. Korean Ammonia Ceramic materials Chemical sensors Fabrication Heat treatment Combinatorial solution deposition Low temperature co-fired ceramics Tin dioxide SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics) Article 10.3740/MRSK.2008.18.2.069 1 Korean Journal of Materials Research, v.18, no.2, pp.69 - 72 Korean Journal of Materials Research 18 2 69 72 scopus kci 2-s2.0-40749158678 Article Ammonia Ceramic materials Chemical sensors Fabrication Heat treatment Combinatorial solution deposition Low temperature co-fired ceramics Tin dioxide Combinatorial solution deposition Gas sensor LTCC (Low Temperature Co-fired Ceramics) SnO2 sol