Lee, Sang-Youp Wereley, Steve T. 2024-01-21T00:02:46Z 2024-01-21T00:02:46Z 2021-08-31 2008-01 0960-1317 https://pubs.kist.re.kr/handle/201004/133870 A simple and cost-effective pressure sensing mechanism which can readily be used to increase measurement resolutions has been introduced. The proposed method measures the local static water pressure in a microchannel using the surface tension and thermodynamic p-v-T relation of air. The idea was tested using a microchannel along which a series of closed-end taps were perpendicularly placed. The prototype device was fabricated with SU-8, a negative photoresist. The dimension of the microchannel was 50 mu m x 7 mu m x 2.4 mm (W x H x L). The closed-end taps were located every 100 mu m along the microchannel with various dimensions of 5-20 mu m x 7 mu m x 500-1500 mu m (W x H x L). The surface tension was calculated through contact angle measurement on the water-air-SU-8 interface. Experiments were performed by imaging the meniscus location and were compared with analytical calculations. The proposed pressure sensing method showed good agreement with the analytical predictions and feasibilities as a valid pressure sensing mechanism in a microscale flow. English IOP PUBLISHING LTD AIR BUBBLES WATER A novel pressure sensing mechanism in a microchannel based on the surface tension and thermodynamic p-v-T relation Article 10.1088/0960-1317/18/1/015020 1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.18, no.1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18 1 scie scopus 000252965900022 2-s2.0-41849131789 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article AIR BUBBLES WATER