유범근 박용욱 최두진 김진상 윤석진 김현재 2024-01-21T00:32:37Z 2024-01-21T00:32:37Z 2021-09-06 2007-09 1225-5475 https://pubs.kist.re.kr/handle/201004/134131 This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such asethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricatedon 128o Y-Z LiNbO3 substrates. Experimental results, which showed the phase change of the output signal under theabsorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethanefilms were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suitedfor a high sensitivity electronic nose system. 한국센서학회 폴리우레탄 감지막에 의한 표면탄성파 가스 센서의 감지능 향상 Improved sensitivity of surface acoustic wave gas sensors by using polyurethane absorption layer Article 2 센서학회지, v.16, no.5, pp.349 - 354 센서학회지 16 5 349 354 kci ART001080367 SAW LiNbO3 gas sensor phase shift electronic nose