Kwon, T. Y. Kim, Y. B. Eom, K. Yoon, D. S. Lee, H. L. Kim, T. S. 2024-01-21T00:33:24Z 2024-01-21T00:33:24Z 2021-09-02 2007-09 0947-8396 https://pubs.kist.re.kr/handle/201004/134170 Electrical properties of piezoelectric thick films with controlled microstructure were investigated. In order to enhance the electromechanical properties (e.g. d(31), d(33)) of a thick film by control of its microstructure, a mixed powder, referred to as BNP, consisting of both nano-sized and micro-sized piezoelectric particles, was employed as a starting precursor in the film fabrication process. According to a scanning electron microscopy study, it is shown that a BNP thick film exhibits the densest homogeneous microstructures. According to surface area measurements, the BNP thick film was sufficiently densified without an additional infiltration process of Pb(Zr1-xTix)O-3 sol for densification. The screen-printed BNP thick film possesses a dielectric constant and a remanent polarization much higher than those of a thick film composed of only micro-sized piezoelectric particles by a factor of more than two. This suggests the potential application of the BNP thick film, in conjunction with a silicon substrate, to a micromachined monolithic PZT thick film device on the silicon substrate. English SPRINGER HEIDELBERG PZT SENSORS MICROCANTILEVER STRESS Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device Article 10.1007/s00339-007-4025-6 1 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.88, no.4, pp.627 - 632 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 88 4 627 632 scie scopus 000248064100007 2-s2.0-34547396532 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article PZT SENSORS MICROCANTILEVER STRESS piezoelectric thick film electromechanical properties