Yun, Tae-Soon Kim, Hyun-Suk Kim, Ki-Byoung Kim, Il-Doo Kim, Ho-Gi Lee, Jong-Chu 2024-01-21T00:35:01Z 2024-01-21T00:35:01Z 2021-09-02 2007-08 0021-4922 https://pubs.kist.re.kr/handle/201004/134246 In this paper, we report on the role of slit-inductors in notably improving phase shifting capabilities in Ba0.6Sr0.4TiO3 (BST) tunable phase shifters utilizing interdigital capacitor (IDC) structure. The IDC-based coplanar waveguide (CPW) phase shifter with slit-inductors fabricated on (100) oriented BST films deposited on MgO substrates exhibits a much enhanced phase difference of 35.52 degrees, as compared to that (25.230 degrees) of the IDC-based phase shifter at 12 GHz. The figure of merit (FoM) of the IDC-based phase shifters with slit-inductors shows larger value of 43.60 degrees/dB as a result of improving phase shifting while retaining an appropriate insertion loss compared to that (35.670 degrees/dB) of the IDC-based phase shifter without slit-inductor. This work demonstrates potential use of slit-inductors for producing high-performance CPW based BST tunable elements in microwave circuit. English INST PURE APPLIED PHYSICS THIN-FILMS BUFFER LAYERS TIO2 New tunable microwave Ba0.6Sr0.4TiO3/MgO phase shifters using interdigital capacitors and slit-inductors Article 10.1143/JJAP.46.5245 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.46, no.8A, pp.5245 - 5248 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 46 8A 5245 5248 scie scopus 000248814100056 2-s2.0-34547875403 Physics, Applied Physics Article THIN-FILMS BUFFER LAYERS TIO2 Ba0.6Sr0.4TiO3 (BST) phase shifter interdigital capacitor (IDC) slit-inductor