Lee, Heon Ju Chang, Young Soo Lee, Yoon Pyo Jeong, Kwang-Hun Kim, Ho-Young 2024-01-21T01:02:25Z 2024-01-21T01:02:25Z 2021-09-02 2007-05-16 0924-4247 https://pubs.kist.re.kr/handle/201004/134388 This work investigates the mechanics of microcantilever deflection due to growth of a vapor microbubble. We construct a theoretical model to predict the elastic beam deflection due to the capillary pressure developed by the bubble growing between the beam and a substrate. The theory is in good agreement with our experimental results in both macro- and micro-scales. The deflection of a thin-solid structure due to growing bubbles can be used in such micromachines as microactuators, microgenerators and micropumps, which are operated as immersed in liquid. (C) 2007 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA Deflection of microcantilever by growing vapor bubble Article 10.1016/j.sna.2007.01.004 1 SENSORS AND ACTUATORS A-PHYSICAL, v.136, no.2, pp.717 - 722 SENSORS AND ACTUATORS A-PHYSICAL 136 2 717 722 scie scopus 000247060600029 2-s2.0-34247636635 Engineering, Electrical & Electronic Instruments & Instrumentation Engineering Instruments & Instrumentation Article microcantilever bubble surface tension elastocapillarity