Chun, Dong Won Hwang, Kyo Seon Eom, Kilho Lee, Jeong Hoon Cha, Byung Hak Lee, Woo Young Yoon, Dae Sung Kim, Tae Song 2024-01-21T01:04:19Z 2024-01-21T01:04:19Z 2021-09-02 2007-04-15 0924-4247 https://pubs.kist.re.kr/handle/201004/134452 Through the use of oscillating microcantilevers, a micromechanical mass detection with a resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric microcantilevers that are simultaneously capable of self-actuation and the electrical measurement of resonant frequencies were fabricated. Mass detection in the Hz per picogram regime is demonstrated with a deposition of an An thin-layer, of which the thickness is precisely controlled. In addition, it is shown that a scaling down of the microcantilevers enhances the sensitivity during the micromechanical mass detection. (c) 2006 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA RESONANT-FREQUENCY SHIFT C-REACTIVE PROTEIN BIOMOLECULAR INTERACTIONS PZT CANTILEVER LABEL-FREE BEHAVIOR SENSORS STRESS Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers Article 10.1016/j.sna.2006.09.013 1 SENSORS AND ACTUATORS A-PHYSICAL, v.135, no.2, pp.857 - 862 SENSORS AND ACTUATORS A-PHYSICAL 135 2 857 862 scie scopus 000246193700069 2-s2.0-34047114088 Engineering, Electrical & Electronic Instruments & Instrumentation Engineering Instruments & Instrumentation Article RESONANT-FREQUENCY SHIFT C-REACTIVE PROTEIN BIOMOLECULAR INTERACTIONS PZT CANTILEVER LABEL-FREE BEHAVIOR SENSORS STRESS microcantilever micromechanical mass detection analytical sensitivity resonant frequency