Park, Jong-Keuk Ziebert, Carlos Stueber, Michael Baik, Young-Joon 2024-01-21T01:05:25Z 2024-01-21T01:05:25Z 2021-09-02 2007-04 1612-8850 https://pubs.kist.re.kr/handle/201004/134498 The Ti(Al)-Si based nitride coating material has been studied due to its excellent mechanical properties such as hardness and oxidation resistance as in the Ti(Al)N/a-Si3N4 nanocomposites with high hardness over 50 GPa. In this study, the effect of microstructure, especially layer thickness of TiAlN and Si3N4 phase, on the mechanical properties of the TiAlN/Si3N4 nanoscale multilayered coating has been investigated. By nanoscale multilayered structurization with a thin Si3N4 layer (similar to 0.3 nm), the hardness and toughness of TiAlN coating were greatly improved. It is known that for the TiAlN/Si3N4 nanoscale multilayered coatings, thickness of the Si3N4 layer is the most important factor and should be carefully controlled to obtain coatings with high hardness and toughness. English WILEY-V C H VERLAG GMBH Improvement of Hardness and Toughness of TiAlN Coating by Nanoscale Multilayered Structurization with Si3N4 Article 10.1002/ppap.200732202 1 PLASMA PROCESSES AND POLYMERS, v.4, pp.S902 - S905 PLASMA PROCESSES AND POLYMERS 4 S902 S905 scie scopus 000207735200176 2-s2.0-67349226031 Physics, Applied Physics, Fluids & Plasmas Physics, Condensed Matter Polymer Science Physics Polymer Science Article hardness nanolayers silicon nitride titanium aluminum nitride toughness