Pukha, V. E. Stetsenko, A. N. Dub, S. N. Lee, J. K. 2024-01-21T01:05:42Z 2024-01-21T01:05:42Z 2021-08-31 2007-04 1533-4880 https://pubs.kist.re.kr/handle/201004/134509 Carbon films 250 divided by 500 nm in thickness deposited on Si wafers from mass-selected flow of accelerated C-60 ions with energies of 5.0 +/- 0.1 keV at temperatures of 300 K and 673 K are characterized by TEM and nanoinclentation. On the TEM images of the films deposited at 673 K, nanocrystalline graphite with the typical grain size of similar to 6 nm is observed. The films deposited at 300 K are transparent in visible light. TEM study of these films has revealed structural elements with lattice spacing close to that of diamond and the grain size of about 4 nm. Nanohardness and elastic modulus of the films prepared at a substrate temperature of 300 K were 23.1 +/- 0.2 GPa and 200 +/- 1 GPa, respectively. Possible mechanisms of the carbon films structure formation are suggested in the framework of a hydrodynamic shock wave model. English AMER SCIENTIFIC PUBLISHERS CARBON-FILMS MOLECULAR-DYNAMICS AMORPHOUS-CARBON GRAPHITE PRESSURE MECHANISMS SIMULATION SURFACE GROWTH MODEL Nanocrystalline diamond thin films deposited from C-60 monoenergetic fullerene ion beam Article 10.1166/jnn.2007.458 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.7, no.4-5, pp.1370 - 1376 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 7 4-5 1370 1376 scie scopus 000245142200021 2-s2.0-34447544563 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article CARBON-FILMS MOLECULAR-DYNAMICS AMORPHOUS-CARBON GRAPHITE PRESSURE MECHANISMS SIMULATION SURFACE GROWTH MODEL nanocrystalline diamond thin films fullerene ion beam shock wave