Yuk, J. M. Lee, J. Y. Jung, J. H. Kim, T. W. Son, D. I. Choi, W. K. 2024-01-21T01:34:42Z 2024-01-21T01:34:42Z 2021-09-04 2007-01-15 0003-6951 https://pubs.kist.re.kr/handle/201004/134737 ZnO thin films were grown on n-Si (001) substrates by using plasma-assisted molecular beam epitaxy. A cross-sectional bright-field transmission electron microscopy (TEM) image showed that small ZnO columnar grains were embedded into large columnar grains, and a selected-area electron diffraction pattern, and an x-ray diffraction pattern showed that the ZnO thin film were nearly c-axis oriented. The evolution of the ZnO columnar structure was analyzed by using the evolution of the strain due to the interaction of the columnar grains, as observed by using high-resolution TEM. The initial formation mechanisms of the supersaturation region and the columnar grains are described. (c) 2007 American Institute of Physics. English AMER INST PHYSICS OPTICAL-PROPERTIES BUFFER LAYER ZINC-OXIDE TEMPERATURE EVOLUTION EMISSION SI Initial formation mechanisms of the supersaturation region and the columnar structure in ZnO thin films grown on n-Si (001) substrates Article 10.1063/1.2432223 1 APPLIED PHYSICS LETTERS, v.90, no.3 APPLIED PHYSICS LETTERS 90 3 scie scopus 000243582400029 2-s2.0-33846406377 Physics, Applied Physics Article OPTICAL-PROPERTIES BUFFER LAYER ZINC-OXIDE TEMPERATURE EVOLUTION EMISSION SI ZnO columnar structure supersaturation