Singh, R. Arvind Yoon, Eui-Sung Kim, Hong Joon Kong, Hosung Park, Se-Jun Lee, Kwang-Ryeol 2024-01-21T01:36:30Z 2024-01-21T01:36:30Z 2021-09-05 2006-12-20 0257-8972 https://pubs.kist.re.kr/handle/201004/134812 Diamond-like carbon (DLc) films deposited on silicon wafer with varying film thickness were investigated for their micro-scale friction behaviour. Films with three different thicknesses, namely 100 nm, 500 nm and 1000 nm, deposited by a radio frequency plasma-assisted chemical vapor deposition method on Si (100) wafer, were used as the test samples. The elastic modulus of the DLC samples increased with their film thickness. The micro-scale friction tests were conducted in a ball-on-flat type micro-tribotester, using soda lime glass balls with different radii (0.25 mm, 0.5 min and 1 mm), and with varying applied normal load (load range: 1500 mu N to 4800 mu N). Results showed that the friction force increased with applied normal load, whereas with respect to the ball size, two different trends were observed. In the case of 100 rim thick sample, friction increased with the ball size at any given normal load, while for 500 nm and 1000 nm thick samples, triction had an inverse relation with the ball size at all applied normal loads. The friction behaviour in the case of the 100 nm thick film was adhesive in nature, whereas for the thicker films plowing was dominant. The friction behaviour of the test samples with the ball size, which was distinctly different, was discussed in terms of the contact area, influenced by their mechanical property, namely, the elastic modulus. (c) 2006 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA TRIBOLOGICAL BEHAVIOR SILICON Friction behaviour of diamond-like carbon films with varying mechanical properties Article 10.1016/j.surfcoat.2006.08.055 1 SURFACE & COATINGS TECHNOLOGY, v.201, no.7, pp.4348 - 4351 SURFACE & COATINGS TECHNOLOGY 201 7 4348 4351 scie scopus 000243149700097 2-s2.0-33751216768 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article; Proceedings Paper TRIBOLOGICAL BEHAVIOR SILICON friction elastic properties SEM PACVD carbon