Park, Jae Hong Kwon, Tae Yun Kim, Hyung Joon Kim, Seung Rae Yoon, Dae Sung Cheon, Chae-Il Kim, Hwan Kim, Tae Song 2024-01-21T02:01:47Z 2024-01-21T02:01:47Z 2021-09-01 2006-12 1385-3449 https://pubs.kist.re.kr/handle/201004/134884 The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiNX/Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 x 380 mu m, 400 x 480 mu m and 400 x 580 mu m cantilever, respectively. English SPRINGER SILICON SYSTEMS CANTILEVER Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film Article 10.1007/s10832-006-6290-8 1 JOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.565 - 572 JOURNAL OF ELECTROCERAMICS 17 2-4 565 572 scie scopus 000243610600082 2-s2.0-33847252516 Materials Science, Ceramics Materials Science Article; Proceedings Paper SILICON SYSTEMS CANTILEVER cantilever resonance sensitivity PZT tick film