Yoo, Beom-Keun Park, Yong-Wook Kang, Chong-Yun Yoon, Seok-Jin Kim, Jin-Sang 2024-01-21T02:02:03Z 2024-01-21T02:02:03Z 2021-09-01 2006-12 1385-3449 https://pubs.kist.re.kr/handle/201004/134895 This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128 degrees Y-Z LiNbO3 piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors. English SPRINGER Surface acoustic wave sensors to detect volatile gases by measuring output phase shift Article 10.1007/s10832-006-0470-4 1 JOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.1013 - 1017 JOURNAL OF ELECTROCERAMICS 17 2-4 1013 1017 scie scopus 000243610600161 2-s2.0-33847306015 Materials Science, Ceramics Materials Science Article; Proceedings Paper gas sensor SAW phase shift sensitive layer