Kim, Hyun-Jun Kim, Dal-Young Ha, Jong-Yoon Kang, Chong-Yun Sung, Man Young Cho, Bong Hee Yoon, Seok-Jin Kim, Hyun-Jai 2024-01-21T02:02:16Z 2024-01-21T02:02:16Z 2021-09-01 2006-12 1385-3449 https://pubs.kist.re.kr/handle/201004/134905 Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM). English SPRINGER PULSED-LASER DEPOSITION LITHIUM-NIOBATE EPITAXIAL-GROWTH Deposition of LiNbO3 thin films for selective etching Article 10.1007/s10832-006-0467-z 1 JOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.933 - 935 JOURNAL OF ELECTROCERAMICS 17 2-4 933 935 scie scopus 000243610600146 2-s2.0-33847201206 Materials Science, Ceramics Materials Science Article; Proceedings Paper PULSED-LASER DEPOSITION LITHIUM-NIOBATE EPITAXIAL-GROWTH ferroelectric selective etching LiNbO3 PLD