Kim, Young-Hwan Shin, Kyeong-Sik Kang, Ji-Yoon Yang, Eun-Gyeong Paek, Kyeong-Kap Seo, Dae-Shik Ju, Byeong-Kwon 2024-01-21T02:06:23Z 2024-01-21T02:06:23Z 2021-09-01 2006-10 1057-7157 https://pubs.kist.re.kr/handle/201004/135074 A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD; S/N = 3) of the system were 0.198 nA/mu M and 10 mu M, respectively. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC MICROFLUIDIC SYSTEMS FABRICATION DEVICE Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications Article 10.1109/JMEMS.2006.880355 1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.15, no.5, pp.1152 - 1158 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 15 5 1152 1158 scie scopus 000241410600013 2-s2.0-33749992722 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article MICROFLUIDIC SYSTEMS FABRICATION DEVICE finger-type p-i-n photodiode interference filter microchannel on-chip organic light-emitting diode (OLED) poly(dimethylsiloxane) (PDMS)-based packaging