Kim, Moojin Moon, Wonkyu Yoon, Euisung Lee, Kwang-Ryeol 2024-01-21T02:34:05Z 2024-01-21T02:34:05Z 2021-09-01 2006-08-14 0924-4247 https://pubs.kist.re.kr/handle/201004/135244 A new capacitive displacement sensor is designed and fabricated for measurement of a large displacement with very high accuracy. This sensor is a kind of linear encoder with an array of microelectrodes made by micromachining processes. The two patterned electrodes on the sensor substrates are assembled facing each other after being coated with thin dielectric film. Due to the resulting small gap size, it is highly sensitive to displacement but minimizes expected misalignments such as tilting error. The sensor fabricated as a sample has a grating of electrodes with a width of 20 mu m which is coated with a diamond-like carbon (DLC) film 0.4 mu m thick. The proposed sensor was tested to conclude that its resolution is 0.9 nm for the measuring range of 15 mm and that the linearity error is expected to be less than 0.0026% of the measurable range. (c) 2005 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA A new capacitive displacement sensor with high accuracy and long-range Article 10.1016/j.sna.2005.12.012 1 SENSORS AND ACTUATORS A-PHYSICAL, v.130, pp.135 - 141 SENSORS AND ACTUATORS A-PHYSICAL 130 135 141 scie scopus 000239295000020 2-s2.0-33745946635 Engineering, Electrical & Electronic Instruments & Instrumentation Engineering Instruments & Instrumentation Article; Proceedings Paper encoder capacitive displacement sensor DLC contact-type high resolution