Park, Jungyul Kim, Jinseok Roh, Dukmoon Park, Sukho Kim, Byungkyu Chun, Kukjin 2024-01-21T02:35:18Z 2024-01-21T02:35:18Z 2021-09-01 2006-08 0960-1317 https://pubs.kist.re.kr/handle/201004/135295 This paper presents a new technique to fabricate three-dimensional thin polymer structures with different geometries on each side for cell-polymer microstructures. To make complex 3D polymer structures, we manufacture a 3D-micromolding aligner, which can make two molding masters be aligned within 2 mu m and allows for applying high pressure to construct thin membranes of less than 20 mu m. Using this system, wafer-level fabrication of thin polymer structures with complex 3D geometries is realized successfully. Generally, 3D polymer microstructures are used in microfluidic systems, such as micromixers, valves and pumps. In this study we demonstrate some applications for these 3D structures as versatile cell-based microsensors for understanding structural and functional changes of cells and as hybrid organic-inorganic actuators that can be operated independently without external power sources. English IOP PUBLISHING LTD PDMS Fabrication of complex 3D polymer structures for cell-polymer hybrid systems Article 10.1088/0960-1317/16/8/024 1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.16, no.8, pp.1614 - 1619 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16 8 1614 1619 scie scopus 000239451200024 2-s2.0-33746281670 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article PDMS 3D-micromolding aligner hybrid system PDMS Cardiomyocyte